Yantai Wanhua Electronic Materials Co., Ltd.
Domestic production of key materials
The company has successfully developed a complete set of high-purity electronic gas methyl/methyl silane preparation technologies by building a systematic and original R&D institution and setting up an internationally advanced electronic gas industry structure integrating research, production and service, and achieved a technological breakthrough in the localization of high-purity disilane.
The technical achievements have been unanimously recognized by the experts of the appraisal committee as having reached the international advanced level, and the “Certificate of Scientific and Technological Achievements” has been issued.
The industrialization project is located in the Chemical Industry Park of Yantai Huangbohai New Area. After the project is put into production, it will achieve domestic substitution of high-purity disilane, and will reach the international leading level after the designed production capacity is fully reached.
Core Product
Our company independently develops products centered around disilane, leveraging our experience in the domestic production of silicon-based specialty gases, to venture into the research and production of specialty gases such as diborane, phosphine, TEOS, and trichlorosilane.
| Name | Purity | Capacity (tons/year) | Production base |
| Disilane (Si2H6) | 4.8N | 50 | Yantai |
| Silane (SiH4) | 6N | 1400 | Yantai, Luoyang |
| Helium (He) | 6N | 400 | Yantai |
| Phosphine (PH3) | 6N | 50 | Jiujiang |
| Diborane (B2H6) | 4.5N | 20 | Jiujiang |
| Electron Bulk Gas | Customized | Customized | On-site gas production |
Disilane COA
| Name | Industry Standards | Product Specifications |
| Disilane | ≥99.998% | >99.998% |
| Oxygen + Argon | <1.0ppm | <1.0ppm |
| Nitrogen | <1.0ppm | <1.0ppm |
| Non-methane hydrocarbons | <1.0ppm | <1.0ppm |
| Carbon monoxide | <1.0ppm | <1.0ppm |
| Carbon dioxide | <1.0ppm | <1.0ppm |
| Chlorosilane | <0.2ppm | <0.2ppm |
| Higher silanes | <50ppm | <50ppm |
| Silane ethers | <5.0ppm | <5.0ppm |
| Silanes | <50ppm | <50ppm |
| Water | <1.0ppm | <1.0ppm |
| Hydrogen | <50ppm | <10ppm |
Silane COA
| Name | National Standards | Product Specifications |
| Silane | ≥99.9999% | ≥99.9999% |
| Hydrogen | <20ppm | <1ppm |
| Oxygen + Argon | <0.05ppm | <0.05ppm |
| Nitrogen | <0.5ppm | <0.05ppm |
| Methane | <0.05ppm | <0.05ppm |
| Non-methane hydrocarbons | <0.1ppm | <0.05ppm |
| Carbon monoxide | <0.05ppm | <0.05ppm |
| Carbon dioxide | <0.05ppm | <0.05ppm |
| Chlorosilane | <0.1ppm | <0.05ppm |
| Silane ether | <0.1ppm | <0.05ppm |
| Disilane | <0.3ppm | <0.2ppm |
| Water | <0.5ppm | <0.5ppm |
Packaging
Disilane and Silane Related Invention Patents
Bulk Gas
| Product | Formula | Specification | Supply model |
| Nitrogen | N2 | 5N/6N | On-site gas production/ Retail |
| Oxygen | O2 | 5N/6N | On-site gas production/ Retail |
| Argon Gas | Ar | 5N/6N | On-site gas production/ Retail |
| Helium | He | 5N/6N | Retail |
| Hydrogen | H2 | 5N | Retail |
| Carbon dioxide | CO2 | 5N | Retail |
| Acetylene | / | / |
Electronic Specialty Gases
| P r o d u c t | Formula | Specification |
| Disilane | Si₂H₆ | 4.8N |
| Silane | SiH4 | 6N |
| Tetraethyl orthosilicate | TEOS | 9N |
| Diborane | Bâ‚‚H6 | 5N |
| Germane | GeHâ‚„ | 5N |
| Nitrogen trifluoride | NF 3 | 4N6 |
| Tungsten hexafluoride | WF6 | 6N |
| Nitrous oxide | Nâ‚‚O | 5N5 |
| Phosphine | PH₃ | 6N |
| Arsine | AsH₃ | 6N |
| Dichlorosilane | SiHâ‚‚Clâ‚‚ | 3N |
| Trichlorosilane | SiHCl₃ | 4N |
| Tetrachlorosilane | SiCl4 | 4N |
| Silicon tetrafluoride | SiF4 | 5N |
| Carbon tetrafluoride | CF4 | 5N |
| Difluoromethane | CHâ‚‚F2 | 5N |
| Fluoroform | CHF₃ | 5N |
| Octafluorocyclobutane | Câ‚„F8 | 5N |
| Eoctafluoropropane | C₃F₈ | 5N |
| Hexafluoroethane | Câ‚‚F6 | 5N5 |
| Hexafluorobutadiene | Câ‚„F6 | 3N8 |
| Boron trifluoride | BF₃ | 4N |
| Boron trichloride | BCl₃ | 5N |
| Sulfur hexafluoride | SF6 | 5N |
| Hydrogen chloride | HCl | 5N |
| Difluoromethane | CH4 | 5N |
| Ammonia | NH₃ | 7N |
| Chlorine | Clâ‚‚ | 5N |
